发明名称 DISC CLEANING MECHANISM AND DISC CLEANING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a disc cleaning mechanism and a disc cleaning device, in which the disc cleaning efficiency using brushes is enhanced by cleaning the brushes for cleaning the discs with brush cleaner circular plates. <P>SOLUTION: Cleaning liquid flow passages for discharging cleaning liquid from a rotatable brush unit are formed in the rotatable brush unit. The cleaning liquid flow passages are formed as passages through which the cleaning liquid fed to a hollow portion in a rotary shaft flows to openings in brush cleaner circular plates via lateral grooves provided around the outer circumference of a core roller and along the axial direction. The cleaning liquid fed to discs from a cleaning nozzle contains in dirt when cleaning the discs, is sucked into the cleaning liquid flow passages, and the dirt is discharged from the rotatable brush unit. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009033119(A) 申请公布日期 2009.02.12
申请号 JP20080157510 申请日期 2008.06.17
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 SHIZAWA NORITAKE;RATTRAY BRIAN
分类号 H01L21/304;G11B5/84 主分类号 H01L21/304
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