| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that when a high and steep driving voltage is applied in chucking, not only torque for chucking but also operating noise are increased. SOLUTION: A driving voltage generating means for a loading motor is controlled so as to increase the positive driving voltage gradually for the loading motor to finish chucking at the start of chucking and decreasing the negative driving voltage gradually for the loading motor to finish un-chucking at the start of un-chucking. COPYRIGHT: (C)2009,JPO&INPIT
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