| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe capable of coping with an excessive heating generation by giving a radiation function to the probe in order to prevent fusing of the probe caused by generation of a heavy current in the probe. SOLUTION: In this probe constituted of a support part to be mounted on a substrate of a probe card; an arm part extending from the support part; and a tip part provided on the tip of the arm part, to be brought into contact with an electrode which is an inspection object, the tip part comprises a contact part and a radiation fin. COPYRIGHT: (C)2009,JPO&INPIT
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