| 摘要 |
A substrate lifting apparatus is provided to prevent the stain generated in the contact area of substrate by lifting the substrate using a wire. The substrate lifting apparatus(30) comprises the bottom electrode(20) and a pair of frames(31a,31b) arranged between the bottom electrode. Three shafts(32a,32b) are screwed on the frame. The wire(33) is connected to the shaft. The bonding groove for combining the shaft is formed on the frame with the regular interval. The frame is ascended and descended with the elevation drive unit. The short circuit of the wire is sensed by the sensor. The groove(21) accommodating the wire is formed in the upper side of the bottom electrode(20) when landing the frame.
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