发明名称 LIGHTING OPTICAL SYSTEM AND EXPOSURE EQUIPMENT HAVING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a lighting optical system capable of performing lighting with an effective light source of high uniformity in shape, irrespective of a place for a lighting region. <P>SOLUTION: The lighting optical system is configured to have a first optical unit 211 that condenses light from a light source, a reflective integrator 213 that is provided with a plurality of cylindrical reflecting surfaces, where bus-bar directions are aligned and form a plurality of linear light sources with the light from the unit 211; an auxiliary mirror 214 constituted of a pair of planar mirrors disposed as mutually opposed along the bus-bars so as to sandwich the plurality of linear light sources; an aperture diaphragm 215, where an aperture through which lights from the plurality of linear light sources pass is provided; and an optical unit 216 that superimposes the lights from the plurality of linear light sources that pass through the aperture on a lighted surface. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009032938(A) 申请公布日期 2009.02.12
申请号 JP20070195929 申请日期 2007.07.27
申请人 CANON INC 发明人 KAJIYAMA KAZUHIKO;TSUJI TOSHIHIKO
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
代理机构 代理人
主权项
地址