SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, PRODUCTION METHOD OF PATTERN FOR THE SAME, MANUFACTURING METHOD FOR THE SAME, AND PRODUCTION APPARATUS OF PATTERN FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To effectively absorb power source noises, achieve a stable operation of a circuit, and absorb noises especially in the close vicinity of a noise generating source. SOLUTION: A semiconductor integrated circuit device has at least one circuit block. A bypass capacitor is provided which is constituted of a first conductor layer 1a on the circuit block and a second conductor layer 1b formed on the first conductor layer 1a via a capacitive insulating film 1c. One of the first and second conductor layers of the bypass capacitor is connected to one of a ground line and a power line through a substrate contact for fixing a substrate potential, and the other of the conductor layers is connected to the other line. COPYRIGHT: (C)2009,JPO&INPIT