| 摘要 |
PROBLEM TO BE SOLVED: To provide a joining method in which two bonding bodies can be joined each other firmly with a high dimensional accuracy and efficiently at a low temperature, to provide a joined body of the two bonding bodies firmly joined each other with a high dimensional accuracy, a highly reliable liquid droplet ejecting head equipped with the joined body, and a liquid droplet ejector equipped with the liquid droplet ejecting head. SOLUTION: The joining method has the process (first process) of obtaining a first bonding body 41 and a second bonding body 42 by forming plasma polymerization films 3 on two base materials 2, respectively; the process (second process) of obtaining a temporary joined body 5 by superposing the two bonding bodies 41 and 42 to make the plasma polymerization films 3 adhere to each other; and the process (third process) of obtaining the joined body 1 by applying an energy to each plasma polymerization film 3 in the temporary joined body 5 thereby joining the plasma polymerization films 3 each other. The plasma polymerization films 3 are preferably composed of polyorganosiloxane as a main material. COPYRIGHT: (C)2009,JPO&INPIT
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