| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dust collection device for laser beam machining which can suck, from above a machining point, scattered dust such as plasma, evaporant, melt and thin film pieces generated at the machining point without polluting any optical element constituting a laser beam passage during laser beam machining, consequently can suppress deposition of the dust on a substrate and stabilize the machining quality. <P>SOLUTION: The dust collection device (V) for laser beam machining comprises a suction device, a suction body (4) having a suction port (40) communicated with the suction device, through which laser beam passes, a dust collector (5) provided inside the suction body (4). A dust chamber (54) through which laser beam passes is provided in the dust collector (5). The dust chamber (54) comprises an optical element (52) allowing the laser beam to pass through and closing an optical path for passing the laser beam emitted by an optical system (1) in an airtight manner, a gas feed passage (55) for feeding compressed gas into the dust chamber (54), an outlet (540) located in a vicinity of the suction port (40) of the suction body (4) for passing the laser beam and opened, and a guide exhaust port (542) for guiding the compressed gas and allowing the compressed gas to flow along the surface of the optical element (52). <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
