| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a waveguide of high productivity improving yield in a final process of external form machining by a dicing saw. SOLUTION: The method for manufacturing an optical waveguide has steps of preparing a polymeric film 10 with at least an ultraviolet ray shielding layer 11 and a clad base material layer 12 laminated, preparing a dicing tape 20 (a base material) having an ultraviolet ray peeled type adhesive layer 22 on the surface, fixing the polymeric film 10 to the dicing tape 20 so that the ultraviolet ray shielding layer 11 and the ultraviolet ray peeled type adhesive layer 22 face each other, forming waveguide cores 13A through which light is propagated, on the clad base material layer 12, carrying out external form machining to the polymeric film 10 formed with the optical waveguide cores on the clad base material layer 12, in a state of being fixed onto the dicing tape 20, irradiating the ultraviolet ray peeled type adhesive layer with ultraviolet rays from the dicing tape 20 side to peel off a laminate to which external form machining is carried out, from the base material. COPYRIGHT: (C)2009,JPO&INPIT |
