| 摘要 |
PROBLEM TO BE SOLVED: To solve ink filling failure to be a cause of trouble of an ink-jet head at the time of applying a thin film to a substrate in a pressure atmosphere lower than an atmospheric pressure. SOLUTION: The ink filling apparatus comprises an ink-jet head for jetting an ink packed in a manifold by a nozzle, a material suction block for receiving the ink dropped from the nozzle, a material tank for supplying an ink to the ink-jet head, a return tank for returning the ink overflowing the manifold to the material tank for reuse, a drain tank for suctioning the waste ink in the material suction block or the return tank by producing negative pressure state by a suction pump, a vacuum container containing the ink-jet head, the material suction block, the material tank, the return tank, and the drain tank in the inside and enabled to be in reduced pressure by a vacuum gas discharge pump, and an outside tank installed in the atmospheric pressure for replenishing the ink to the material tank. COPYRIGHT: (C)2009,JPO&INPIT |
