| 摘要 |
PROBLEM TO BE SOLVED: To provide a friction coefficient estimation device and a friction coefficient estimation method of a DLC (Diamond Like Carbon) film applicable to quality control of the DLC film or the like, capable of estimating nondestructively a friction coefficient of the DLC film. SOLUTION: This friction coefficient estimation device 1 of the DLC film includes a laser Raman spectroscopic device 2 (band information acquisition means) for acquiring band information of G-band or D-band of the DLC film by laser Raman spectroscopy; a database storage means 3 for storing a database wherein the band information of the G-band or the D-band by the laser Raman spectroscopy of the DLC film is correlated beforehand with the friction coefficient of the DLC film; and an estimation means 4 for estimating the coefficient of the DLC film based on the band information of the DLC film acquired by the laser Raman spectroscopic device 2, and the database. COPYRIGHT: (C)2009,JPO&INPIT
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