发明名称 A METHOD FOR FORMING METAL PATTERN BY USING SURFACE CHARACTERISTICS AND METAL PATTEN FORMED THEREBY
摘要 A method for forming a metal micropattern, and a metal pattern formed by the method are provided to simplify the process, to improve productivity and economical efficiency by using no developer or etchant. A method for forming a metal micropattern comprises the steps of forming a hydrophobic surface modified layer(22) on a hydrophile substrate(21); removing the hydrophobic surface modified layer into a desired pattern shape by using laser(23); coating a hydrophile metal salt or a metal nanoparticle dispersion dispersed in the mixture dispersion medium of at least 2 kinds of media having the boiling point difference of 10 deg.C or more on the substrate surface where the hydrophobic surface modified layer is removed; and removing the dispersion medium of the hydrophile metal salt or the metal nanoparticle dispersion.
申请公布号 KR20090015634(A) 申请公布日期 2009.02.12
申请号 KR20070080132 申请日期 2007.08.09
申请人 LG CHEM. LTD. 发明人 SHIN, BU GON;KIM, JAE JIN;LEE, JONG TAIK;SHIN, HYUN WOO
分类号 G03F7/16;G03F7/26 主分类号 G03F7/16
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