| 摘要 |
PROBLEM TO BE SOLVED: To provide a detergent composition having excellent pitting corrosion-preventing effects to a metal wiring material, especially a detergent composition having excellent properties for separating and removing a photoresist, and excellent corrosion-resisting properties and pitting corrosion-preventing effects to the metal wiring material. SOLUTION: The detergent composition usable in a production process of a semiconductor integrated circuit or a liquid crystal display comprises (A) at least one kind of hydrofluoric acid and a hydrofluoric acid salt, (B) at least one kind of a sulfite and a disulfite, and (C) water. COPYRIGHT: (C)2009,JPO&INPIT |
