| 摘要 |
#CMT# #/CMT# The device (20) has supporting points (121) for a two-dimensional substrate (2) such that the supporting points carry the substrate, which is force-freely held with objects (3). A medium (125) e.g. mercury, is provided in a container (130) for force-free holding of the substrate. The container has an opening to receive the substrate. An intermediate element is formed as one-part intermediate element and arranged between the substrate and medium such that direct contact between the substrate and the medium is absent. The element has a membrane made of flexible material e.g. rubber. #CMT#USE : #/CMT# Holding device for a two-dimensional substrate e.g. wafer and mask, in a coordinates-measuring device (claimed), which is utilized for measuring coordinates of objects e.g. templates, on the substrate for wafer manufacturing and in an industrial application i.e. semiconductor industry, for metrology of line widths or positions on the substrate. Can also be used for a flat screen, evaporating structure and a transparent substrate. #CMT#ADVANTAGE : #/CMT# The two-dimensional substrate is force-freely held, thus completely avoiding the bending of the substrate, and hence enabling high reproducibility of the measurement of the object on the substrate. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a side view of a holding device without an intermediate element. 2 : Two-dimensional substrate 3 : Objects 20 : Holding device 121 : Supporting points 125 : Medium 126 : Surface of medium 130 : Container 156 : Vibration device. |
