| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a miniaturizable piezoelectric pressure sensor capable of acquiring excellent sensitivity, and reducing cost. <P>SOLUTION: This piezoelectric pressure sensor 1 is equipped with a beam part wherein a half or more of an axially perpendicular cross section is formed of a piezoelectric body 4, a weight 3 supported by one end side of the beam part, a support stand 2 for supporting the other end side of the beam part, and an electrode 5 for taking out a polarization voltage generated in the piezoelectric body 4. <P>COPYRIGHT: (C)2009,JPO&INPIT |
