MEMS DEVICE FORMED INSIDE HERMETIC CHAMBER HAVING GETTER FILM

摘要

PROBLEM TO BE SOLVED: To prevent performance degradation of a MEMS device by electrically stabilizing a getter film in the MEMS device including the getter film formed inside a hermetic chamber.

SOLUTION: The MEMS device 100 includes a movable portion and a fixed portion formed inside the hermetic chamber. The hermetic chamber is formed by a base material (oscillator) 10 of the MEMS device 100 and glass substrates 30 and 32 having concave portions 34, 36a, ..., 36f made therein. A part 40c of any continuous getter film 40 formed inside the hermetic chamber connects to only one of any one or a plurality of certain electrical potentials of the fixed portion or a ground potential of the fixed portion through the base material 10 of the MEMS device 100.

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