SEALING MECHANISM, STAGE DEVICE AND ELECTRON-BEAM DRAWING DEVICE

摘要

PROBLEM TO BE SOLVED: To bring an airtight state between a vacuum chamber and a mobile body without working an external force to the mobile body pulled into the vacuum chamber from the outside. SOLUTION: The inside of a guide member 51 is divided into spaces V2 and V3 surrounded by a first bellows 61 and a second bellows 62 and three spaces V1 to V3 mutually brought to the airtight state in another space V1 by fixing one sides and the other sides of the first bellows 61 and the second bellows 62 being extensible and having mutually different outside diameters respectively on one side and the other side of the guide member 51 and one side and the other side of a balance plate 60b for a slider 60. The resultant force of the restoring forces of the first bellows 61 and the second bellows 62 working in response to the location of a hollow shaft 52A and an external force working to the mobile body by a differential pressure or the like between the mutual spaces V1 and V2 are cancelled by governing the internal pressure of the space V1 by a pressure-governing unit 80. COPYRIGHT: (C)2009,JPO&INPIT