| 摘要 |
PROBLEM TO BE SOLVED: To obtain a heat treatment system in which process recipe can be prepared, in a short time and the delivery schedule can be quickened. SOLUTION: A semiconductor fabrication apparatus comprises a controller for controlling the heat treatment system by process recipe. The controller displays a retrieval screen retrieving a plurality of process recipes created, depending on the constitution information of the heat treatment system. When the constitution information is inputted as a retrieval key and when a predetermined execution button is clicked, the controller displays a process recipe helpful for preparing the process recipe of the heat treatment system on the retrieval screen, based on the constitution information; and when the process recipe is selected, the content of the selected process recipe is displayed so as to be referred to on the retrieval screen, and an adjustment work is performed, based on the selected process recipe. COPYRIGHT: (C)2009,JPO&INPIT
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