| 摘要 |
PROBLEM TO BE SOLVED: To measure a space distribution of a dielectric constant, and to measure temperature dependency, accurately without performing operation processing after measurement, so that a probe contact force to a dielectric sample becomes always constant. SOLUTION: This dielectric constant measuring device for measuring a dielectric constant in a fine domain just under the probe of the dielectric sample from an oscillation frequency of an LC oscillation circuit, is equipped with the probe to be in contact with the surface of the dielectric sample placed on a sample stage, an electrode having a fixed potential provided on the periphery of the probe, the LC oscillation circuit connected to the probe and the electrode so that each capacitance generated by contact of the probe with the surface of the dielectric sample becomes parallel, and a frequency discriminator for measuring the oscillation frequency of the LC oscillation circuit. The device has a constitution equipped with a substrate on which the probe, the electrode and the LC oscillation circuit are mounted, a rail, and a block movable in the vertical direction along the rail, wherein the substrate and the block are bonded together, and the probe, the electrode and the LC oscillation circuit can be moved integrally in the vertical direction. COPYRIGHT: (C)2009,JPO&INPIT
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