| 摘要 |
PROBLEM TO BE SOLVED: To prevent the casing of a vacuum pump from being broken by an internal pressure. SOLUTION: This safety device for a vacuum pump is arranged to be connected to a duct putting the interior of the casing of the vacuum pump in communication with the outside environment. The safety device includes a breakable member 3 which breaks when subjected to a certain pressure. The certain pressure is at least equal to a predetermined threshold P so chosen that the member breaks in case of too high an excessive pressure which could damage the pump, and remains unbroken at operating pressures during normal operation of the pump. COPYRIGHT: (C)2009,JPO&INPIT
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