Photoresist Composition for Deep UV and Process Thereof,申请号US20070834490-传众专利搜索

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法人/股东/高管

发明名称	Photoresist Composition for Deep UV and Process Thereof
摘要	The present invention refers to a photoresist composition comprising (i) a polymer A comprising at least one acid labile group; (ii) at least one photoacid generator; (iii) at least one base; (iv) a polymer B, where polymer B is non-miscible with polymer A and soluble in the coating solvent, and; (v) a coating solvent composition. The present invention also relates to the process of imaging the photoresist.
申请公布号	US2009042148(A1)	申请公布日期	2009.02.12
申请号	US20070834490	申请日期	2007.08.06
申请人	PADMANABAN MUNIRATHNA;CHAKRAPANI SRINIVASAN;LIN GUANYANG	发明人	PADMANABAN MUNIRATHNA;CHAKRAPANI SRINIVASAN;LIN GUANYANG
分类号	G03C1/04;G03C5/00	主分类号	G03C1/04
代理机构		代理人
主权项
地址

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