发明名称 SEMICONDUCTOR ELEMENT AND METHOD FOR PRODUCTION OF SEMICONDUCTOR ELEMENT
摘要 Disclosed is a semiconductor element having a semiconductor layer mainly composed of MgxZn1-xO (0=x<1), wherein the content of manganese contained as an impurity in the semiconductor layer is 1 OE1016 cm-3 or less.
申请公布号 WO2009020183(A1) 申请公布日期 2009.02.12
申请号 WO2008JP64227 申请日期 2008.08.07
申请人 ROHM CO., LTD.;NAKAHARA, KEN;AKASAKA, SHUNSUKE;KAWASAKI, MASASHI;OHTOMO, AKIRA;TSUKAZAKI, ATSUSHI 发明人 NAKAHARA, KEN;AKASAKA, SHUNSUKE;KAWASAKI, MASASHI;OHTOMO, AKIRA;TSUKAZAKI, ATSUSHI
分类号 H01L33/16;C01G9/00;C23C14/08;H01L21/363;H01L33/28 主分类号 H01L33/16
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