发明名称 SEMICONDUCTOR DEVICE WITH HIGH-K/DUAL METAL GATE
摘要 An apparatus, and method of manufacture thereof, comprising a first semiconductor device and a second semiconductor device. The first semiconductor device includes a first gate electrode having a first metal layer forming a first trench and a second metal layer filling the first trench, wherein the first and second metal layers have substantially different metallic compositions. The second semiconductor device includes a second gate electrode having a third metal layer forming a second trench and a fourth metal layer filling the second trench, wherein the third and fourth metal layers have substantially different metallic compositions, and wherein the first and third metal layers have substantially different metallic compositions.
申请公布号 US2009039433(A1) 申请公布日期 2009.02.12
申请号 US20070836015 申请日期 2007.08.08
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 YANG WEN-CHIH;CHEN CHIEN-LIANG;LEE CHII-HORNG;CHUANG HARRY
分类号 H01L21/8238;H01L29/94 主分类号 H01L21/8238
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