发明名称 |
ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME |
摘要 |
The present invention provides an aberration corrector giving excellent assembly accuracy but having fewer parts and fewer adjustment locations in number. In order to achieve it, a multistage multipole is formed by arranging plural combinations of electrodes around an optical axis using alignment blocks, each combination of electrodes being made by brazing-integrating plural electrodes with a ceramic material interposed therebetween.
|
申请公布号 |
US2009039281(A1) |
申请公布日期 |
2009.02.12 |
申请号 |
US20080187635 |
申请日期 |
2008.08.07 |
申请人 |
KAWASAKI TAKESHI;MORIYA NOBORU;NAKANO TOMONORI;HIROSE KOTOKO |
发明人 |
KAWASAKI TAKESHI;MORIYA NOBORU;NAKANO TOMONORI;HIROSE KOTOKO |
分类号 |
H01J3/14;G01N23/04 |
主分类号 |
H01J3/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|