| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the smear occurring in an image without having an electronic shutter and a mechanical shutter. <P>SOLUTION: This imaging apparatus for EUV light or X-rays includes an imaging section for forming an image by imaging using EUV light or X-rays, and an acquiring section for acquiring the differential image between the first image formed by carrying out imaging with a first exposure time by the imaging section and the second image formed by carrying out imaging with a second exposure time by the imaging section. Further, an EUV exposure apparatus of this invention includes the imaging apparatus for EUV light. <P>COPYRIGHT: (C)2009,JPO&INPIT |
