SUBSTRATE DETECTION DEVICE AND SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate detection device which can accurately detect the holding state of a substrate under processing. SOLUTION: The substrate detection device includes: a picked-up image generation means to photograph a held substrate plural times under different exposure conditions and generate a plurality of picked-up image data; an image synthesizing means to synthesize the picked-up image data and generate a synthesized image data; a holding position specification means to specify the holding position of the substrate in a holding means on the basis of the synthesized image; and a holding condition determination means to compare the holding position of the specified substrate with the supposed holding position and to generate a detection result indicating that the holding condition of the substrate is normal or not according to that both positions are matched or not. COPYRIGHT: (C)2009,JPO&INPIT