| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method capable of effectively removing dust and pollutants stuck to a motor unit without affecting a bearing or the like even in a state the unit is completed. SOLUTION: Inside the chamber in a pressure lower than a supercritical state, a nozzle unit for which a first nozzle for jetting supercritical carbon dioxide and a second nozzle for sucking and recovering the supercritical carbon dioxide are integrated is traversed relatively to the surface to be cleaned of an object to be cleaned, the supercritical carbon dioxide is jetted from the first nozzle to the surface to be cleaned, and particulates peeled off from the surface of the object to be cleaned or the pollutants dissolved from the surface of the object to be cleaned are sucked and recovered together with the supercritical carbon dioxide from the second nozzle. Thus, washing is surely executed without the secondary contamination of bearing oil, and since a large load is not given to the object to be cleaned, thereby preventing deformation. COPYRIGHT: (C)2009,JPO&INPIT
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