发明名称 LIQUID DISCHARGE APPARATUS AND THE LIQUID DISCHARGE METHOD
摘要 PROBLEM TO BE SOLVED: To provide a liquid discharge apparatus which is capable of discharging a liquid with uniform viscosity and to provide a liquid discharge method. SOLUTION: The liquid discharge apparatus is provided with: a liquid discharge part (coating head 30) having a discharge port (nozzle opening 31) to discharge a predetermined liquid (coating solution); a liquid reserving part 40 to reservoir a liquid (coating solution) supplied to the liquid discharge part (coating head 30), which is connected with the liquid discharge part (coating head 30) via a liquid supply tube (supply tube 50); and a first agitation means (rise and fall means 60, control means 70) to agitate the liquid (coating solution) by supplying the liquid (coating solution 2) again into the liquid discharge part (coating head 30) while transferring the liquid reserving part 40 to the upper part after returning the liquid (coating solution 2) supplied to the liquid discharge part (coating head 30) and the liquid supply tube (supply tube 50) into the liquid resering part 40 while transferring the liquid reserving part 40 to the lower part of the discharge port (nozzle opening 31). COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009028644(A) 申请公布日期 2009.02.12
申请号 JP20070195224 申请日期 2007.07.26
申请人 SEIKO EPSON CORP 发明人 MOMOSE SHINYA
分类号 B05C11/10;B05C5/02;H01L21/027 主分类号 B05C11/10
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