SAW SENSOR

摘要

A surface acoustic wave sensor for sensing change of pressure or temperature is provided to improve linearity of resonant frequency by directly adding pressure to a piezoelectric plate having a resonator. A cavity is formed in one side of a substrate(110), and has a predetermined depth. A piezoelectric plate(120) is adhered in one side among both sides of the substrate in order to cover the cavity, and has piezoelectric characteristic in order to form a surface acoustic wave. A pressure resonator(130) is installed in one part corresponding to the cavity, and generates the surface acoustic wave by a radio frequency signal. A reference resonator(140) is installed in the other part corresponding to the cavity, is parallel arranged with the pressure resonator, and generates the surface acoustic wave by the radio frequency.