CLEANING APPARATUS, CLEANING TANK, CLEANING METHOD AND CLEANING-CONTROL PROGRAM

摘要

Cleaning device, the cleaning bath, the cleaning solution and the cleaning control program are provided that the cleaning quality can be drastically improved as the flow of the cleaning fluid within the cleaning bath is controlled or ejected. A cleaning device comprises a cleaning bath(1) filled with the cleaning fluid(WF), a flow control unit(5) forming the predetermined flow about the cleaning fluid within the cleaning bath, an exhaust unit(3) arranged in the flow channel (FP) of the cleaning fluid. The exhaust unit ejects the cleaning fluid. The cleaning fluid is ejected by the discharging means to the cleaning bath outside. The flow control unit forms the flow in order to join to the central part of the cleaning bath.