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发明名称
APPARATUS FOR FIXING SUBSTRATE AND APPARATUS FOR PROCESSING THE SUBSTRATE USING THE SAME
摘要
申请公布号
KR100883095(B1)
申请公布日期
2009.02.11
申请号
KR20020076644
申请日期
2002.12.04
申请人
发明人
分类号
G02F1/13;(IPC1-7):G02F1/13
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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