PROBE CARD AND APPARATUS FOR TESTING A WAFER HAVING THE PROBE CARD

摘要

A probe card and a wafer inspecting apparatus having the same are provided to maintain horizontality at end portions of probes by fixing a second substrate structure at a reinforcement plate and not affecting horizontality of the second substrate structure even though deformation is generated at a first substrate structure. A probe card(100) includes a first substrate structure, a reinforcement plate and a second substrate structure. The first substrate structure(110) has a plurality of openings(118) along its edge. A plurality of protrusions(138) is formed on a bottom surface of the reinforcement plate(130). The reinforcement plate is coupled to a top surface of the first substrate structure. The protrusions are inserted into the openings of the first substrate structure. The second substrate structure(120) is formed at a bottom surface of the first substrate structure having the reinforcement plate. The second substrate structure is electrically connected to the first substrate structure and has a plurality of probes at its bottom surface.