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发明名称
METHOD FOR MICROSTRUCTURING SOLID SURFACES
摘要
申请公布号
EP1859479(B1)
申请公布日期
2009.02.11
申请号
EP20060723328
申请日期
2006.03.09
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;JOHANN WOLFGANG GOETHE-UNIVERSITAET FRANKFURT AM MAIN
发明人
MAYER, KUNO;KRAY, DANIEL;KOLBESEN, BERND, O.;HOPMAN, SYBILLE
分类号
H01L21/304;B24C1/00
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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