Method and installation for fracturing a composite substrate via an embrittlement plane

摘要

The method involves realizing fracture of a composite structure (100) along a fragilization plane defined between a thin layer and a rest layer i.e. negative layer, of a donor substrate e.g. gallium nitride plate. The composite structure is maintained against stiffeners (118) at the moment of releasing of energy during fracturing of the structure, where the stiffeners are placed on both sides of the structure and spaced from the structure. An independent claim is also included for a housing for a pod of a thermal annealing installation.