发明名称 |
Self-calibrating pressure sensor |
摘要 |
<p>The device has a pressure sensor (1) provided with a sensing element (11) whose less thickness segment has a membrane (12) made of conducting silicon. The membrane is provided with a piezoelectric transducer (13) e.g. bipolar transistor, for transmitting a mechanical stress by an electric signal. A non-deformable conducting substrate made of conducting silicon is separated from the element by an insulating element. An actuator (2) has a non-deformable base (21) and a polarizable surface (22). The sensor is placed above the actuator such that the membrane is at the upright of the surface. The actuator has a metal electrode (24) on a non-deformable insulating substrate made of insulating silicon and connected to a voltage source.</p> |
申请公布号 |
EP2022395(A1) |
申请公布日期 |
2009.02.11 |
申请号 |
EP20080104806 |
申请日期 |
2008.07.21 |
申请人 |
CAPTOMED EURL;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) |
发明人 |
PONS, PATRICK;MONTORIOL, PIERRE;YAMEOGO, PIERRE |
分类号 |
A61B5/0215;A61B5/03 |
主分类号 |
A61B5/0215 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|