INSPECTION HEAD SUPPORTING STRUCTURE IN SURFACE INSPECTING APPARATUS, AND SURFACE INSPECTING APPARATUS

摘要

A pair of angular contact bearings 20A, 20B are disposed between a bearing house 16b of an inspection head 16 and a head supporting tube 8, and a spacer 25 and a spring bearing ring 26 are disposed between outer races 20o of the bearings 20A, 20B. The spacer 25 and the spring bearing ring 26 are urged by a coil spring 27 toward the side of the outer race 20o. An O-ring 28 is disposed between the spacer 25 and the outer race 20o of the bearing 20B, and the outer circumference of the O-ring is brought into closely contact with the inner circumference of the bearing house 16b. The outer races 20o are constrained by a step part 16f in the bearing house 16b and an end cap 29 screwed into the inspection head 16. Removing the end cap 29 makes it possible to take out the bearing housing 16b and a main shaft part 16c integrally from atop of the bearings 20A, 20B.