ESD protection for mems display panels

摘要

A MEMS (Microelectromechanical system) device is described. The device includes an array of MEMS elements with addressing lines and MEMS switches configured to selectively connect the addressing lines to a ground or other potential in the event of an overvoltage, such as during an ESD event. The arrangement is particularly advantageous for protecting the array, because the MEMS switches can be formed using substantially the same processing steps which are used to form the array.