<p>The present invention relates to a method for manufacturing micro/nanofluidic devices that incorporate overhanging micromechanical and metal components monolithically integrated with the fluidic circuitry.</p>
申请公布号
EP2022753(A1)
申请公布日期
2009.02.11
申请号
EP20070765875
申请日期
2007.05.22
申请人
IKERLAN CENTRO DE INVESTIGACIONES TECNOLOGICAS, S.COOP.