发明名称 MIM capacitor and method of making same
摘要 A MIM capacitor device and method of making the device. The device includes an upper plate comprising one or more electrically conductive layers, the upper plate having a top surface, a bottom surface and sidewalls; a spreader plate comprising one or more electrically conductive layers, the spreader plate having a top surface, a bottom surface and sidewalls; and a dielectric block comprising one or more dielectric layers the dielectric block having a top surface, a bottom surface and sidewalls, the top surface of the dielectric block in physical contact with the bottom surface of the upper plate, the bottom surface of the dielectric block over the top surface of the spreader plate, the sidewalls of the upper plate and the dielectric block essentially co-planer.
申请公布号 US7488643(B2) 申请公布日期 2009.02.10
申请号 US20060425549 申请日期 2006.06.21
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 COOLBAUGH DOUGLAS DUANE;ESHUN EBENEZER E.;HE ZHONG-XIANG;RASSEL ROBERT MARK
分类号 H01L21/8242 主分类号 H01L21/8242
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