Method for controlling/regulating a physical quantity of a dynamic system, in particular a micromechanical sensor

摘要

A method for controlling/regulating a physical variable of a dynamic system to a specific desired value profile with use made of a pulse modulator that generates a sequence of discrete modulation signals that affect the control or regulation of the physical variable. The method involves repeated execution of: determining an exact value or an approximation for the deviation between the momentary desired value and the momentary actual value of the physical variable; determining the respective change in the deviation which would result from the maintenance of the momentary modulation signal or the switching over to the other modulation signals; and generating that modulation signal which results in the best approximation of the momentary desired value.