| 发明名称 |
PROCESSING PIEZOELECTRIC MATERIAL |
| 摘要 |
Techniques are described for forming actuators having piezoelectric material. A block of piezoelectric material is bonded to a transfer substrate. The block is then polished. The polished surface is bonded to a MEMS body. |
| 申请公布号 |
KR20090014193(A) |
申请公布日期 |
2009.02.06 |
| 申请号 |
KR20087029799 |
申请日期 |
2007.05.04 |
| 申请人 |
FUJIFILM DIMATIX, INC. |
发明人 |
CHEN ZHENFANG;BIRKMEYER JEFFREY |
| 分类号 |
B81C1/00;C03C25/68;C23F1/00;H01L41/22 |
主分类号 |
B81C1/00 |
| 代理机构 |
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