NANO RESONATOR WITH FREQUENCY TUNING BY DIRECT CURRENT DRIVING POWER

摘要

A nano resonator tuning a frequency by using DC power is provided to control a vibration frequency of a resonator according to the variation of the DC voltage. A beam with a sandwich structure is fixed on a silicon wafer(200). The beam with the sandwich structure generates the mechanical vibration according to the alternating current and the applied magnetic field. The AC power source(220) applies the AC voltage in both ends of the beam with the sandwich structure. The DC power source(230) applies the DC voltage in both ends of the beam with the sandwich structure. The beam with the sandwich structure includes a silicon carbide beam(211), a first metallic conductor(212) and a second metallic conductor(214). The first metallic conductor is deposited on the silicon carbide beam. Both ends of the first metallic conductor are connected to the AC power source. The second metallic conductor is deposited on the first metallic conductor. Both ends of the second metallic conductor are connected to the DC power source.