A CONNECTIVE MATERIAL OF GAS DISTRIBUTION PLATE FIXATION AND THIN FILM TREATMENT APPARATUS INCLUDING THE SAME

摘要

A combining member for fixing a gas distribution plate is provided to prevent the gas distribution plate losing by fixing a central part of the gas distribution plate with a combining member separated from 3 shifts on the upper electrode. A combining member for fixing a gas distribution plate comprises a first combining member fixed to an insertion hole whose screw hole is formed on the upper part of gas distribution plate; a second combining member(120) whose one end is screwed up in the first combining member connecting through the upper electrode and the other end is exposed to the top of the upper electrode; and a third combining member connected to the other end of the exposed second combining member after assembling.