| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a solution of a radiation-sensitive resin composition for spacer formation giving a uniform and even film thickness and suitable for a slit die coater method. <P>SOLUTION: The radiation-sensitive resin composition comprises (A) a copolymer of (a1) at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic acid anhydrides and (a2) another unsaturated compound different from the component (a1), (B) a polymerizable unsaturated compound, (C) a radiation-sensitive radical generator, and (D) a solvent represented by formula (1), wherein R<SB>1</SB>is a 1-3C alkyl group, and R<SB>2</SB>is a hydrogen atom or a 1-3C alkyl group. <P>COPYRIGHT: (C)2009,JPO&INPIT |
