| 摘要 |
PROBLEM TO BE SOLVED: To provide a porus material having high and stable characteristics preferably used as a gas separating film, a method for manufacturing the same, and a gas separating device. SOLUTION: A solution containing polysilazane is coated on the circumferential surface of a porus base material composed of silicon nitride, and a porus film 16 comprising a porus ceramics of amorphous state having bondings such as Si-C, Si-N, Si-O-N and Si-O-C having a pore diameter of about 0.62 nm and a thickness of 100 to 200 nm is subsequently produced by performing calcining treatment. Because a solution with a number average molecular weight within a range of 2,000 to 5,000 g/mol and a viscosity within a range of 20 to 200 mPa s is used as a solution containing poly silazane, the solution can be coated on the surface of an intermediate layer 14 in a proper thickness, to thereby form a porous ceramic film produced by the calcining treatment with a thin thickness of 100 to 200 nm and with a micro pore diameter of about 0.5 to 1.0 nm. COPYRIGHT: (C)2009,JPO&INPIT
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