发明名称 APPARATUS FOR DISCHARGING LIQUID DROPLET, WEIGHT MEASUREMENT METHOD AND DISCHARGING METHOD OF LIQUID OBJECT
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for discharging liquid droplets which is capable of measuring the discharging amount with good productivity and to provide a weight measuring method. SOLUTION: The apparatus for discharging the liquid droplets draws the diagram by discharging a functional liquid 44 from a liquid droplet discharging head 15 while relatively displacing the substrate and the liquid droplet discharging head 15. The apparatus is provided with a weight measuring apparatus 25 to measure the weight of the functional liquid 44 discharged to a receiving plate 52 from the liquid droplet discharging head 15 and a carriage and maintenance stage 22 to move the liquid droplet discharging head 15 to a place opposite to the receiving plate 52. There are an individual flank wind prevention part 33 and an outside flank wind prevention part 34 at the surroundings of the liquid droplet discharging head 15, which break down the air current flowing in contact with the receiving plate 52. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009022845(A) 申请公布日期 2009.02.05
申请号 JP20070186603 申请日期 2007.07.18
申请人 SEIKO EPSON CORP 发明人 KOJIMA KENJI
分类号 B05C5/00;B05C11/00;B05D1/26 主分类号 B05C5/00
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