发明名称 N-channel MOS Transistor Fabricated Using A Reduced Cost CMOS Process
摘要 An NMOS transistor includes a semiconductor substrate of a first conductivity type, first and second well regions of a second conductivity type formed spaced apart in the substrate, a conductive gate formed over the region between the spaced apart first and second well regions where the region of the substrate between the spaced apart first and second well regions forms the channel region, dielectric spacers formed on the sidewalls of the conductive gate, first and second heavily doped source and drain regions of the second conductivity type formed in the semiconductor substrate and being self-aligned to the edges of the dielectric spacers. The first and second well regions extend from the respective heavily doped regions through an area under the spacers to the third well region. The first and second well regions bridge the source and drain regions to the channel region of the transistor formed by the third well.
申请公布号 US2009032850(A1) 申请公布日期 2009.02.05
申请号 US20070833138 申请日期 2007.08.02
申请人 MICREL, INC. 发明人 ALTER MARTIN
分类号 H01L29/78 主分类号 H01L29/78
代理机构 代理人
主权项
地址