| 摘要 |
<p>An apparatus for detecting substrate and a robot for transferring substrate including the same are provided to sense existence and nonexistence of a substrate loaded in a finger part of a robot without a separate sensor and sequence in vacuum condition. An apparatus for detecting a substrate comprises a finger part(10), a gas spray hole(11), a gas supply part, a detecting part, and a determining unit. The finger part is coupled in an end part of a robot arm, is lifted/rotated by an axis part(5), supports a substrate(S), and has U shape. A front side of the finger part is opened. The gas spray hole is connected to an inner part of the finger part, and is connected to the gas supply part using a pipe. A valve for on/off is installed on the pipe line.</p> |
