| 摘要 |
A substrate transport apparatus is provided to prevent the substrate from being broken away from of the hand part by blocking the air current when the hand part descends at high speed. The axis part(20) comprises the rotation shaft and elevating shaft. The axis part is connected to the arm(30) and rotates and elevates. The hand part(40) supports the substrate by combining with the arm part. The cut-out part(50) blocks the ascending current from the substrate when lowering the hand part in the high speed. The cut-out part comprises the plate of the predetermined shape positioned in the lower part of the hand part.
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