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发明名称
SYSTEM UND METHODE FÜR DIE HERSTELLUNG ZIRCON- UND/ODER HAFNIUMHÄLTIGER SCHICHTEN
摘要
申请公布号
DE60325484(D1)
申请公布日期
2009.02.05
申请号
DE2003625484
申请日期
2003.08.27
申请人
MICRON TECHNOLOGY INC.
发明人
VAARTSTRA, BRIAN A.
分类号
C23C16/40;C23C16/42;C23C16/00;C23C16/44;C23C16/455;C23C16/56;H01L21/00;H01L21/314;H01L21/316
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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